A Study on Formability of a Polyimide Film by Using Visco-Elasticity Measurement and Hot-Embossing Tests

Sung Won Youn; Kazumi Suda; Masaharu Takahashi; Ryutaro Maeda

doi:10.4028/www.scientific.net/MSF.561-565.1189

Paper Titles

Investigation of Aluminum Content on the Properties of Sol-Gel-Derived Zinc Oxide Thin Films
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Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films
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High-Performance Poly-Ge Thin-Film Transistor with NiGe Schottky Source/Drain
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Investigation of Mechanical and Structural Properties of AlN Thin Films Prepared by Mid-Frequency Pulsed Magnetron Sputtering
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A Study on Formability of a Polyimide Film by Using Visco-Elasticity Measurement and Hot-Embossing Tests
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Growth and its Properties of GaMnN Film Based on ECR-PEMOCVD
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Nanowire Fabrication of Silicon-Based Materials
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Microstructure and Electrical Properties of Nano Ni-Cr Thin-Films Fabricated by Magnetron Co-Sputtering Techniques
p.1201

Synthesis of Single-Walled Carbon Nanotube Networks on Silicon Nanowires
p.1205

HomeMaterials Science ForumMaterials Science Forum Vols. 561-565A Study on Formability of a Polyimide Film by...

A Study on Formability of a Polyimide Film by Using Visco-Elasticity Measurement and Hot-Embossing Tests

Abstract:

This study explores the dynamic mechanical properties (e.g., storage shear modulus, loss tangent and shear viscosity) and formability of a polyimide film by visco-elasticity measurement and hot-embossing tests. The variations of storage shear modulus, tangent delta and the shear viscosity were measured as a function of the temperature for two frequencies. As a polyimide goes through its glass transition, it exhibits dramatic decreases in shear modulus and viscosity as well as the peak of tangent delta, and continues to show strong dependence on frequency and temperature. Moreover, the filling characteristics (e.g., surface appearance, replicated depth and surface roughness) of polyimide were investigated by hot-embossing tests at different temperatures using a mold with an aspect ratio of 2.5:1.