Formation of Rough TiO2 Thin Films on Glass and Porous Silicon by Sol-Gel Method

N. Benzekkour; F.Z. Ghomrani; N. Gabouze; S. Kermadi; M. Boumaour; K. Ferdjani

doi:10.4028/www.scientific.net/MSF.609.139

Paper Titles

Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering
p.117

Investigation of Deep Interface Traps in Very-Thin Oxide/Si Structures Prepared at Low Temperatures Using Chemical Solutions
p.123

Correlation between Physicochemical and Electrical Properties of Hydrogenated Amorphous Silicon Doped with Boron: Effect of Thermal Annealing
p.129

Properties of ZnO Thin Films Grown on Si Substrates by Ultrasonic Spray and ZnO/Si Heterojunctions
p.133

Formation of Rough TiO₂ Thin Films on Glass and Porous Silicon by Sol-Gel Method
p.139

Study of Unsupported and Al₂O₃ or SiO₂-Supported Nickel Molybdate for Oxireforming of Ethane
p.145

Effect of the Electrode Geometry on the Diffusion-Current Problem of the Rotating Porous Silicon Electrode in HF Solution
p.149

Characterization of Thin Layer SnO₂/Glass by Neutrons Reflectometry
p.155

Study of the On-Surface Diffusion of the Ternary System Au/Pd/Si (111)
p.161

HomeMaterials Science ForumMaterials Science Forum Vol. 609Formation of Rough TiO2 Thin Films on Glass and...

Formation of Rough TiO₂ Thin Films on Glass and Porous Silicon by Sol-Gel Method

Abstract:

Substrate dipping in a composite sol-gel solution was used to prepare smooth and rough thin films of titanium dioxides (TiO2) on porous silicon (PS) and conductor glass. The fabrication process and optical measurements of these layers are presented. Sol-gel films were coated by dip-coating method on porous silicon layer. The characterizations of deposited layer were performed by spectral response, ellipsometry and spectrophotometry. The results show that the optical and electrical properties of the structures strongly depend on the deposition conditions of TiO2. In addition, the band gap energy Eg and refractive index of the structure can be easily varied depending on TiO2 thicknesses and calcination temperatures. Finally, the electrical and optical parameters show a promising result in solar cells application and photocatalytic activity.