Study of 3C-SiC Mechanical Resonators, Filters and Mixers

Abstract:

The design, fabrication and characterisation of flexural-mode 3C-SiC resonators are presented. Single-clamped, double-clamped beams and circular membranes, with aluminium and platinum electrodes patterned on top, have been implemented. The structures’ resonant frequency has been investigated optically when the devices are actuated mechanically and electro-thermally. Electro-thermal mixing of two input electrical signals with two different frequencies has been demonstrated. The temperature stability of the 3C-SiC resonators has been characterised.

• Periodical: Materials Science Forum (Volume 711)
• Pages: 43-50
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.711.43
• Online since: January 2012
• Authors: Enrico Mastropaolo, Rebecca Cheung
• Keywords: Electro-Thermal Actuation, Frequency Stability, Micro-Electromechanical System (MEMS), Mixing, Resonators, Silicon Carbide (SiC)

References

[1] B. H. Houston and M. Zalalutdinov, Toward the creation of the world's smallest radio, NRL Review acoustics (2005).

[2] C. Lam, A review of the recent development of MEMS and crystal oscillators and their impact on the frequency control product industry, Int. Ultrasonic Symp. 2008 IEEE (2008) 694-704.

[3] A. Partridge, J. McDonald, MEMS resonators look to displace quartz oscillators, MEMS Manufacturing (2006) 11-14.

[4] P. Sarro, Silicon carbide as a new MEMS technology, Sens. and Act. A: Phys. 82 (2000) 210-218.

[5] V. Cimalla, J. Pezoldt, O. Ambacher, Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications, J. of Phys. D: Appl. Phys. 40 (2007) 6386-6434.

DOI: 10.1088/0022-3727/40/20/s19

[6] J. M. Melzak, Silicon carbide for RF MEMS, Microwave Symp. Dig. IEEE MTT-S International 3, (2003) 1629-1632.

DOI: 10.1109/mwsym.2003.1210450

[7] R. Cheung, Silicon Carbide Micro Electromechanical Systems for Harsh Environments, Imperial College Press, London, 2006.

[8] R. J. Wilfinger, P. H. Bardell, D. S. Chhabra, The resonistor: a frequency selective device utilizing the mechanical resonance of a silicon substrate, IBM J. of Res. and Dev. 12 (1968) 113.

DOI: 10.1147/rd.121.0113

[9] L. Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S. Burdess, M. Mehregany and C.A. Zorman, SiC cantilever resonators with electrothermal actuation, Sens. Actuators A 128 (2006) 376-386.

DOI: 10.1016/j.sna.2006.01.045

[10] E. Mastropaolo, I. Gual, R. Cheung, Silicon carbide electrothermal mixer-filters, Elec. Lett. 46 (2010) 62-63.

DOI: 10.1049/el.2010.3051

[11] R.A. Johnson, Mechanical filters in electronics, Wiley, New York, 1983.

[12] C. Leondes, ed., MEMS/NEMS Handbook - Sensors and Actuators, vol. 4, Springer, New York, 2006.

[13] Information on http://www.novasic.com/

[14] N. O. V. Plank, M. A. Blauw, E. W. J. M. van der Drift, R. Cheung, The etching of silicon carbide in inductively coupled SF6/O2 plasma, J. of Phy. D: App. Phys. 36 (2003) 482.

DOI: 10.1088/0022-3727/36/5/310

[15] A. O'Hara, G. Pringle, L. Slater, M. Leavy, T. McKie, B. Dickson, M. Stone, MEMSTAR Technology, (2005) Semicon.

[16] E. Mastropaolo, R. Cheung, A. Henry and E. Janzen, Electrothermal actuation studies of silicon carbide ring resonators, J. Vac. Sci. Technol. B 27 (2009) 3109-3114.

DOI: 10.1116/1.3244622

[17] K. Babaei Gavan, H.J.R. Westra, E.W.J.M Van der Drift, W.J. Venstra and H.S.J. Van der Zant, Impact of fabrication technology on flexural resonances of silicon nitride cantilevers, Microelec.. Eng. 86 (2009) 1216-1218.

DOI: 10.1016/j.mee.2009.03.113

[18] M. Pozzi, M. Hassan, A. J. Harris, J. S. Burdess, L. Jiang, K. K. Lee, R. Cheung, G. Phelps, N. G. Wright, C. A. Zorman, M. Mehregany, Mechanical properties of a 3C-SiC film between room temperature and 600 °C, J. Phys. D, Appl. Phys. 40 (2007) 3335-3342.

DOI: 10.1088/0022-3727/40/11/012

[19] V.L. Doughtie, A. Vallance and L.F. Kreisle, Design of Machine Members, McGraw-Hill, 1964.

[20] S. Roy, R. G. DeAnna, C. A. Zorman, M. Mehregany, Fabrication and characterization of polycrystalline SiC resonators, IEEE Trans. Electron. Dev. 49 (2002) 2323.

DOI: 10.1109/ted.2002.807445

[21] Tables of Physical & Chemical Constants, Kaye & Laby Online Version 1.0, 2005, (16th ed. 1995).

[22] G.S. Wood, I. Gual, P. Parmiter and R. Cheung, Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators, Microelec. Rel. 50 (2010) 1977-1983.

DOI: 10.1016/j.microrel.2010.05.011