Vapor-Phase Catalyst Delivery Method for Growing SiC Nanowires

Rooban Venkatesh K.G. Thirumalai; Bharat Krishnan; Albert Davydov; Joseph Neil Merrett; Yaroslav Koshka

doi:10.4028/www.scientific.net/MSF.740-742.209

Paper Titles

The Growth of 3-Inch 4H-SiC Si-Face Epitaxial Wafer with Vicinal Off-Angle
p.193

Step-Bunching Free and 30 μm-Thick SiC Epitaxial Layer Growth on 150 mm SiC Substrate
p.197

Step Instability in Sublimation Epitaxy on Low Off-Axis 6H-SiC
p.201

Role of Cl/Si Ratio in the Low-Temperature Chloro-Carbon Epitaxial Growth of SiC
p.205

Vapor-Phase Catalyst Delivery Method for Growing SiC Nanowires
p.209

Simulation of Gas-Phase Chemistry for Selected Carbon Precursors in Epitaxial Growth of SiC
p.213

The Nucleation and Propagation of Threading Dislocations with C-Component of Burgers Vector in PVT-Grown 4H-SiC
p.217

Uniformity and Morphology of 10 x 100mm 4° Off-Axis 4H-SiC Epitaxial Layers and their Effect on Device Performance
p.221

Surface Preparation of 4° Off-Axis 4H-SiC Substrate for Epitaxial Growth
p.225

HomeMaterials Science ForumMaterials Science Forum Vols. 740-742Vapor-Phase Catalyst Delivery Method for Growing...

Vapor-Phase Catalyst Delivery Method for Growing SiC Nanowires

Abstract:

A method was developed for growing SiC nanowires without depositing a metal catalyst on the targeted surfaces prior to the CVD growth. The proposed method utilizes in-situ vapor-phase catalyst delivery via sublimation of the catalyst from a metal source placed in the hot zone of the CVD reactor, followed by condensation of the catalyst-rich vapor on the bare substrate surface to form the catalyst nanoparticles. The vapor-phase catalyst delivery and the resulting nanowire density was found to be influenced by both the gas flow rate and the catalyst diffusion through the boundary layer above the catalyst source. The origin of undesirable bushes of nanowires and the role of the C/Si ratio were established.

You might also be interested in these eBooks

Silicon Carbide and Related Materials 2012

View Preview

Info:

Periodical:

Materials Science Forum (Volumes 740-742)

Pages:

209-212

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.740-742.209

Citation:

Cite this paper

Online since:

January 2013

Authors:

Rooban Venkatesh K.G. Thirumalai, Bharat Krishnan, Albert Davydov, Joseph Neil Merrett, Yaroslav Koshka

Keywords:

Chemical Vapor Deposition (CVD), CVD, Epitaxial Growth, Nanowire

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] X. Li, X. Wang, R. Bondokov, J. Morris, Y.H. An, and T.S. Sudarshan, Journal of Biomedical Materials Research. Part B, Applied Biomaterials 72 (2005), pp.353-61.

Google Scholar

[2] R. Yakimova, R. M. Petoral Jr., G. R. Yazdi, C. Vahlberg, A. Lloyd Spetz, K. Uvdal, J. Phys. D: Appl. Phys. 40 (2007), pp.6435-6442.

DOI: 10.1088/0022-3727/40/20/s20

Google Scholar

[3] P.G. Neudeck, D. J. Spry, A.J. Trunek, L. J. Evans, L. -Y. Chen, G. W. Hunter, and D. Androjna, Mater. Sci. Forum V. 600-603 (2009), pp.1199-1202.

DOI: 10.4028/www.scientific.net/msf.600-603.1199

Google Scholar

[4] K Zekentes and K Rogdakis, J. Phys. D: Appl. Phys. 44 (2011) 133001 (17pp).

Google Scholar

[5] H. Pedersen, S. Leone, O. Kordina, A. Henry, S. -I. Nishizawa, Y. Koshka and E. Janzén, Chemical Reviews (2012) 112, 2434–2453.

DOI: 10.1021/cr200257z

Google Scholar

[6] B. Krishnan, R.V.K.G. Thirumalai, and Y. Koshka , S. Sundaresan, I. Levin and A. V. Davydov, J. N. Merrett, Crystal Growth & Design (2011) 11(2), 538-541.

DOI: 10.1021/cg101405u

Google Scholar

[7] R. V. K. G. Thirumalai, B. Krishnan, A. V. Davydov, J. N. Merrett and Y. Koshka, Cryst. Growth & Design (2012) 12, 2221−2225.

Google Scholar

[8] H.M. Cheng, F. Li, G. Su, H.Y. Pan, L.L. He, X. Sun, M.S. Dresselhaus, Appl. Phys. Let. (1998) 72 (25), 3282-3284.

Google Scholar

[9] K. Wegner, B. Walker, S. Tsantilis, S. E. Pratsinis, Chemical Engineering Science (2002) 57 1753 – 1762.

DOI: 10.1016/s0009-2509(02)00064-7

Google Scholar

[10] R. V. K. G. Thirumalai, B. Krishnan, A. V. Davydov, J. N. Merrett and Y. Koshka, Journal of Materials Research, Available on CJO (2012) doi: 10. 1557/jmr. 2012. 208.

Google Scholar