Estimation of Material Damping Coefficients of AlN for Film Bulk Acoustic Wave Resonator

Abstract:

AlN has been widely used as the piezoelectric thin film layer in film bulk acoustic wave resonator (FBAR). The performance of FBAR is influenced by various geometrical parameters and losses from piezoelectric material such as thermoelastic damping and material damping. This research focuses on the estimation of material damping coefficients (α and β) of the AlN by using the Akhieser approximation to estimate more accurate values of the coefficients, thus a more realistic value of the quality (Q) factor is achieved for FBAR operating at Ku-band frequency ranges (12 GHz-18 GHz).

• Periodical: Materials Science Forum (Volume 819)
• Pages: 209-214
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.819.209
• Online since: June 2015
• Authors: N.I.M. Nor*, N. Khalid, Rozana Aina Maulat Osman, Z. Sauli
• Keywords: Aluminum Nitride (AlN), Damping Coefficients, FBAR, Piezoelectric

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