Oxygen Behavior during Silicon Epitaxial Growth: Recent Advances

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Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

1069-1074

Citation:

B. Pivac et al., "Oxygen Behavior during Silicon Epitaxial Growth: Recent Advances", Materials Science Forum, Vols. 83-87, pp. 1069-1074, 1992

Online since:

January 1992

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