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HomeMaterials Science ForumMaterials Science Forum Vols. 83-87Oxygen Behavior during Silicon Epitaxial Growth:...

Oxygen Behavior during Silicon Epitaxial Growth: Recent Advances

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Defects in Semiconductors 16

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Periodical:

Materials Science Forum (Volumes 83-87)

Pages:

1069-1074

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.83-87.1069

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Online since:

January 1992

Authors:

B. Pivac, A. Borghesi, M. Geddo, A. Sassella, A. Stella

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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