Dependence of Negative Substrate Bias on the Optical and Electrical Properties of W-Doped Vanadium Dioxide Thin Films

Abstract:

W-doped VO₂ films were prepared by DC reactive magnetron sputtering with various substrate bias. The microstructure, surface morphology, electrical and optical performances of the films were characterized by x-ray diffraction, scanning electron microscope, four-point probe method and spectrophotometer, respectively. The effect of substrate bias on microstructure, electrical and optical properties of sputtered W-doped VO₂ films was studied. The XRD results reveal that all samples exhibit preferential VO₂ (011) lattice orientation except the as-grown sample in our experiment. All the samples applied substrate bias show some degree optical switching performance in IR range, while the thermochromic phenomena was observed from resistance-temperature dependence plot only for the samples of substrate bias varied from-100V to-200V. This indicate that the optical and electrical properties of W-doped VO₂ films have different sensitivity to substrate bias. Optimal substrate bias of-200V sample shows fine semiconductor-metal-transition performance.

• Periodical: Materials Science Forum (Volume 847)
• Pages: 184-189
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.847.184
• Online since: March 2016
• Authors: Mao Dong Zhu, Dong Ping Zhang, Yi Liu, Kai Yang, Guang Xing Liang, Zhuang Hao Zheng, Ping Fan
• Keywords: DC Magnetron Sputtering, Optical Transmittance, Substrate Bias, W-Doped VO₂ Films

References

[1] V. Melnik, I. Khatsevych, V. Kladko, A. Kuchuk, V. Nikirin, B. Romanyuk, Low-temperature method for thermochromic high ordered VO2 phase formation, Materials Letters. 68 (2012) 215–217.

DOI: 10.1016/j.matlet.2011.10.075

[2] G. Xu, P. Jin, M. Tazawa, K. Yoshimura, Thickness dependence of optical properties of VO2 thin films epitaxially grown on sapphire (0001), Applied Surface Science. 244 (2005) 449–452.

DOI: 10.1016/j.apsusc.2004.09.157

[3] W. Burkhardt, T. Christmann, S. Franke, Tungsten and fluorine co-doping of VO2 films, Thin Solid Films. 402(2002) 226–231.

DOI: 10.1016/s0040-6090(01)01603-0

[4] T.J. Hanlon, J.A. Coath, M.A. Richardson, Molybdenum-doped vanadium dioxide coatings on glass produced by the aqueous sol–gel method, Thin Solid Films. 436 ( 2003) 269–272.

DOI: 10.1016/s0040-6090(03)00602-3

[5] M. Tazawa, P. Jin, S. Tanemura, Optical constants of V1-xWxO2 Films, Applied. Optical. 37 (1998) 1858–1861.

DOI: 10.1364/ao.37.001858

[6] C.H. Chen, X. J Yi, J. Zhang, B. F Xiong, Micromachined Uncooled IR Bolometer Linear Array Using VO2 Thin Films, International Journal of Infrared and Millimeter Waves. 22(2001) 53-58.

[7] W.W. Li, J.J. Zhu, J.R. Liang, Z.G. Hu, J. Liu, H.D. Chen, J.H. Chu, External electric field manipulations on structural phase transition of vanadium dioxide nanoparticles and its application in field effect transistor, J. Phys. Chem. C. 47 (2011).

DOI: 10.1021/jp207196g

[8] J.M. Wu, L.B. Liou, Room temperature photo-induced phase transitions of VO2 nanodevices, J. Mater. Chem. 21 (2011) 5499.

DOI: 10.1039/c0jm03203d

[9] S. S. N. Bharadwaja, C. Venkatasubramanian, N. Fieldhouse, S. Ashok, M. W. Horn, and T. N. Jackson, Low temperature charge carrier hopping transport mechanism in vanadium oxide thin films grown using pulsed dc sputtering, Applied. Physics. Letters. 94(2009).

DOI: 10.1063/1.3139864

[10] Y. Q. Wang, Z. J. Zhang, and Y. Zhu, Nanostructured VO2 photocatalysts for hydrogen production, ACS Nano. 2(2008) 1492.

[11] J. Livage, M. Henry, and C. Sanchez, Sol-gel chemistry of transition metal oxides, Solid State Chem. 18(1988) 259.

DOI: 10.1016/0079-6786(88)90005-2

[12] T. W. Chiu, K. Tonooka, and N. Kikuchi, Influence of oxygen pressure on the structural, electrical and optical properties of VO2 thin filmsdeposited on ZnO/glass substrates by pulsed laser deposition, Thin Solid Films. 518(2010) 7441.

DOI: 10.1016/j.tsf.2010.05.019

[13] D.P. Zhang, R.G. Huang, T. Zhang, Y. Li, Y.T. Chen, Y.L. Zhong, P. Fan, and J.J. Huang, Effect of substrate temperature on the microstructure, optical, and electrical properties of reactive DC magnetron sputtering vanadium oxide films, Phys. Status Solidi A. 209(2012).

DOI: 10.1002/pssa.201228211

[14] Q.H. Li, D.L. Zhu, W.J. Liu, Y. Liu, X.C. Ma, Optical properties of Al-doped ZnO thin films by ellipsometry, Applied Surface Science. 254(2008) 2922-2926.

DOI: 10.1016/j.apsusc.2007.09.104