Synthesis and Characterization of Si3N4 Nanopowder by RF Induction Thermal Plasma

Xuan Zhao; Hai Yan Chen; Chen Yang Shu; Li Hua Dong; Yan Sheng Yin

doi:10.4028/www.scientific.net/MSF.898.1597

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HomeMaterials Science ForumMaterials Science Forum Vol. 898Synthesis and Characterization of Si3N4 Nanopowder...

Synthesis and Characterization of Si₃N₄Nanopowder by RF Induction Thermal Plasma

Abstract:

Nano-Si₃N₄ has been synthesized by the thermal plasma with silicon tetrachloride (SiCl₄) as the Si source, liquid ammonia (NH₃) as the N source, and silane (SiH₄) as the catalyst. And the prepared Nano-Si₃N₄was heat-treated atfour different temperatures of 1350°C, 1400°C, 1450°C, 1500°C. The as-prepared samples were characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM), scanning electron microscopy (SEM) and fourier transform infrared spectroscopy (FTIR). The results showed that the particle size of the nano-Si₃N₄ powder was less than 100 nm and it was amorphous when the temperature below 1450°C. At 1500°C, the synthesized Si₃N₄ powder with the grain size of 10 nm was crystallized, and the α-phase Si₃N₄ reached more than 90%.

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Periodical:

Materials Science Forum (Volume 898)

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1597-1602

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https://doi.org/10.4028/www.scientific.net/MSF.898.1597

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Online since:

June 2017

Authors:

Xuan Zhao*, Hai Yan Chen, Chen Yang Shu, Li Hua Dong, Yan Sheng Yin

Keywords:

Induction Plasma, Nanopowder, Silane Catalysis, Silicon Nitride

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