Cross-Correlation Analysis of Fluctuations of Interactions between Nanoparticles and Low Pressure Reactive Plasmas

Ren Zhou; Kento Mori; Hiroshi Ohtomo; Daisuke Yamashita; Hyun Woong Seo; Naho Itagaki; Kazunori Koga; Masaharu Shiratani

doi:10.4028/www.scientific.net/MSF.941.2104

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HomeMaterials Science ForumMaterials Science Forum Vol. 941Cross-Correlation Analysis of Fluctuations of...

Cross-Correlation Analysis of Fluctuations of Interactions between Nanoparticles and Low Pressure Reactive Plasmas

Abstract:

We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.

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Materials Science Forum (Volume 941)

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2104-2108

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.941.2104

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Online since:

December 2018

Authors:

Ren Zhou, Kento Mori, Hiroshi Ohtomo, Daisuke Yamashita, Hyun Woong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratani*

Keywords:

Cross-Correlation Analysis, Fluctuation, Nanoparticle, Plasma

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* - Corresponding Author

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