Thin Platinum Films Topology Formation on Ceramic Membranes

Article Preview

Abstract:

This article presents the technological aspects of experiments on the stable topological patterns formation from thin films of platinum on ceramic membranes. Platinum thin films were deposited by magnetron sputtering on a clean or pre-activated laser ceramics surface. After the deposition of platinum films, the method of various short-term laser irradiation was attempted to form a topological pattern. The results are discussed.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

272-276

Citation:

Online since:

February 2020

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2020 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] Vasiliev A V, Pisliakov A V, Sokolov A V, Samotaev N N, Soloviev S A, Oblov K, Guarnieri V, Lorenzelli L, Brunelli J, Maglione A, Lipilin A S, Mozalev A and Legin A V, Non-silicon MEMS platforms for gas sensors, 2016 Sensors and Actuators, B: Chemical 224 700-713.

DOI: 10.1016/j.snb.2015.10.066

Google Scholar

[2] Samotaev N, Oblov K and Ivanova A, Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices, 2018 MATEC Web of Conferences 207 article 04003.

DOI: 10.1051/matecconf/201820704003

Google Scholar

[3] Samotaev N, Oblov K, Gorshkova A, Ivanova A, Etrekova M, Rapid Prototyping of MOX Gas Sensors in Form-factor of SMD Packages, 2019 Proceedings 8th GOSPEL Workshop. Gas Sensors Based on Semiconducting Metal Oxides: Basic Understanding & Application Fields, 88-90.

DOI: 10.3390/proceedings2019014052

Google Scholar

[4] Vasiliev A A, Pavelko R G, Gogish-Klushin S Yu, Kharitonov D Yu, Gogish-Klushina O S, Sokolov A V, Samotaev N N, Alumina MEMS platform for impulse semiconductor and IR optic gas sensors, 2007, Proceedings of TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, article 4300563 2035-2037.

DOI: 10.1109/sensor.2007.4300563

Google Scholar

[5] Oblov K, Ivanova A, Soloviev S, Samotaev N, Pisliakov A, Sokolov A, Vasiliev A, 2015 Fabrication of metallization by laser sintering of micro powders, Physics Procedia, 72, 470-474.

DOI: 10.1016/j.phpro.2015.09.011

Google Scholar