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Ion Implantation in GaAs
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Rapid Isothermal Annealing of Ion Implanted Gallium-Arsenide
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Defects and Doping Effects in CdTe and CulnS₂ by Phosphorus Ion Implantation and Pulsed Electron Beam Annealing
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Implantation of Silicon in Indium Phosphide for Metal Insulator Semiconductor Transistors
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Thermal Annealing of Be Implanted InSb
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Range of Various Implanted Ions in III-V Materials
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HomeSolid State PhenomenaSolid State Phenomena Vols. 1-2Rapid Isothermal Annealing of Ion Implanted...

Rapid Isothermal Annealing of Ion Implanted Gallium-Arsenide

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Ion Implantation in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 1-2)

Pages:

281-341

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.1-2.281

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Online since:

January 1988

Authors:

Sukhdev Singh Gill

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© 1988 Trans Tech Publications Ltd. All Rights Reserved

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