Recoil Implantation for Shallow Junction Formation in Silicon

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 1-2)

Edited by:

D. Stievenard and J.C. Bourgoin

Pages:

195-201

DOI:

10.4028/www.scientific.net/SSP.1-2.195

Citation:

H. L. Kwok "Recoil Implantation for Shallow Junction Formation in Silicon", Solid State Phenomena, Vols. 1-2, pp. 195-201, 1988

Online since:

January 1991

Authors:

Export:

Price:

$35.00

In order to see related information, you need to Login.