Most of the gases detecting metal oxide semiconductors are operated at temperatures above 250oC. It is not energy efficient for MOS gas sensors to operate at such high temperature. To solve this problem, research and investigations are trying to obtain new MOS sensing materials that can operate at ambient temperature. In this study, gas sensing materials consisting of MOS and carbon nanotubes (CNTs) are developed for detecting gases at lower temperature. The hybrid system, MWCNTs/TiO2, demonstrates the possibility of detecting the gases at ambient temperature with high energy efficiency.