Property of NOx Gas Sensor Using Carbon Nanotube Prepared by Thermal CVD Method

Abstract:

Article Preview

Carbon nanotube (CNT) gas sensors for NOx gas detection were prepared. CNTs were grown on an Al2O3 substrate with interdigital Pt-electrodes (Al2O3 ceramic substrate) using both pulsed laser deposition (PLD) and thermal chemical vapor deposition (CVD) method. In this method, Al buffer layer and Fe catalytic thin film were prepared on the substrate by PLD method and then CNTs were grown by thermal CVD method. Surface images of CNTs on the substrates were observed by SEM, and the gas sensing property specific to NO gas was measured. Resistance of the prepared CNTs gas sensor decreased with increase of sensor temperature, and it decreased with increase of NO gas concentration at room temperature.

Info:

Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

1253-1256

DOI:

10.4028/www.scientific.net/SSP.124-126.1253

Citation:

T. Ueda et al., "Property of NOx Gas Sensor Using Carbon Nanotube Prepared by Thermal CVD Method", Solid State Phenomena, Vols. 124-126, pp. 1253-1256, 2007

Online since:

June 2007

Export:

Price:

$35.00

In order to see related information, you need to Login.