Nano-Imprinted Ultrahigh-Density Nanopore Arrays
Nano-structured polymer stamps were prepared from porous anodic alumina templates. Prepolymers were poured onto the highly ordered porous anodic alumina templates, and they were cured by UV-irradiation. Simple separation of the elastic stamp from the nanoporous aluminum oxide leads to well replicated nano-stamps. The nanopatterns on the stamp were transferred as ultrahigh-density nanopore arrays on various substrates which are potentially applicable to the fabrication of ultrahigh-density metallic or semiconductor nanodot arrays for magnetic storage devices or display devices.
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
K. H. Kim et al., "Nano-Imprinted Ultrahigh-Density Nanopore Arrays", Solid State Phenomena, Vols. 124-126, pp. 1269-1272, 2007