Nano-Imprinted Ultrahigh-Density Nanopore Arrays

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Abstract:

Nano-structured polymer stamps were prepared from porous anodic alumina templates. Prepolymers were poured onto the highly ordered porous anodic alumina templates, and they were cured by UV-irradiation. Simple separation of the elastic stamp from the nanoporous aluminum oxide leads to well replicated nano-stamps. The nanopatterns on the stamp were transferred as ultrahigh-density nanopore arrays on various substrates which are potentially applicable to the fabrication of ultrahigh-density metallic or semiconductor nanodot arrays for magnetic storage devices or display devices.

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Solid State Phenomena (Volumes 124-126)

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1269-1272

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June 2007

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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