Characterization of a-Se(As:Cl) Film for Phosphor Coupled X-Ray Light Modulators
Amorphous selenium (a-Se) film has the potential to fulfill the requirements of a novel x-ray image detector because of its good photo-to-dark impedance ratio, large area coverage, and low temperature deposition. In this work were studied the structural, optical and electrical properties of thermally- evaporated a-Se film for the phosphor-light modulator (PLM). From the x-ray diffraction and electron microscopy experimental results, the deposited film had an amorphous phase without any re-crystallization or defects. Also, the light absorption in widely visible range of 400 ~ 630 nm was over 95 %. From the electrical measurements, the low dark current density of 2.8 nA/cm2 was obtained at 10 V/㎛. The x-ray sensitivity of the 270㎛-Gd2O3:Eu phosphor coupled 20㎛-Se film was 7.31 nC/cm2-mR. From such experimental results, the novel x-ray detector which incorporates phosphor coupled x-ray light modulator, makes an operation at low x-ray exposure possible, therefore, the applications as a medical imaging detector are shown below.
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
S. S. Kang et al., "Characterization of a-Se(As:Cl) Film for Phosphor Coupled X-Ray Light Modulators", Solid State Phenomena, Vols. 124-126, pp. 1677-1680, 2007