Texture Evolution in the Sputtered and Electro-Deposited Cu Thin Films Using EBSD Method

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Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

215-218

DOI:

10.4028/www.scientific.net/SSP.124-126.215

Citation:

S. H. Lee and N. J. Park, "Texture Evolution in the Sputtered and Electro-Deposited Cu Thin Films Using EBSD Method", Solid State Phenomena, Vols. 124-126, pp. 215-218, 2007

Online since:

June 2007

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Price:

$35.00

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