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HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126Texture Evolution in the Sputtered and...

Texture Evolution in the Sputtered and Electro-Deposited Cu Thin Films Using EBSD Method

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Advances in Nanomaterials and Processing

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Periodical:

Solid State Phenomena (Volumes 124-126)

Pages:

215-218

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.124-126.215

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Online since:

June 2007

Authors:

Sang Hoon Lee, No Jin Park

Keywords:

Annealing Texture, Cu Films, Electron Backscatter Diffraction (EBSD), Grain Growth, Twin

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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