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HomeSolid State PhenomenaSolid State Phenomena Vols. 124-126A Method for Interpreting V-I Probe in a...

A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge

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Periodical:

Solid State Phenomena (Volumes 124-126)

Pages:

327-330

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.124-126.327

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Online since:

June 2007

Authors:

Su Jin Yoo, O Dae Kwon, Hee Hwan Choe, Jae Hong Jeon, Kang Woong Lee, Jong Hyun Seo, Dae Jin Seong, Jung Hyung Kim, Yong Hyeon Shin

Keywords:

Capacitively Coupled Plasma, Langmuir Probe, Phase Difference, Plasma Density, Rf Discharges, V-I Probe

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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Citation:

[1] HeeHwan CHOE: Journal of the Korean Physical Society, Vol. 48, May 2006, p.982~984

[2] C.W. Chung, S.S.kim,and H.Y. Chang: "Experimental measurement of the electron energy distribution function in the radio frequency electron cyclotron resonance inductive discharge", Physical Review E vol.69, p.16406(2004)

DOI: 10.1103/physreve.69.016406

[3] MICHAEL A. LIEBERMAN: Principles Of Plasma Discharges and Materials Processing.

[4] MICHAEL A. LIEBERMAN: IEEE Transactions on Plasma Science, VOL. 16, NO. 6, DECEMBER (1988)