A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

327-330

DOI:

10.4028/www.scientific.net/SSP.124-126.327

Citation:

S. J. Yoo et al., "A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge", Solid State Phenomena, Vols. 124-126, pp. 327-330, 2007

Online since:

June 2007

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.