Fabrication and Characterization of SiO2 Based Waveguide Co-Doped with Si-Nanocrystal and Er3+
Si and Er co-doped SiO2 films were fabricated by radio-frequency (RF) magnetron sputtering technique with a Si-Er-SiO2 target. The optical gain of 0.7 dB/cm was confirmed by the direct pumping of Er3+ using the laser diode (LD) of 980 nm in wavelength and 60 mW in output power. On the contrary, the pumping Si-nanocrystals by the Hg lamp 365 nm (1.5 W/cm2) induced the absorption loss above 1.48 μm region in wavelength, which was attributed to the free carrier absorption of Si-nanocrystals.
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
S. W. Choi et al., "Fabrication and Characterization of SiO2 Based Waveguide Co-Doped with Si-Nanocrystal and Er3+", Solid State Phenomena, Vols. 124-126, pp. 515-518, 2007