Fast Light-Induced Solid Phase Crystallization of Nanometer Thick Silicon Layers on Quartz

Abstract:

Multi-quantum wells (MQW) with nanometer thick crystalline Si layers are considered among the promising light absorbers for application in the next generation of photovoltaic cells. Proper crystallization of the initially amorphous Si (a-Si) layers in such MQW presents a challenge. Recently it was shown that light-induced solid-phase crystallization (LISPC) leads to almost complete crystallization of Si layers in the MQW. In this report we present and discuss recent results, problems and prospects related to the large-scale LISPC process of MQW structures on glass.

• Periodical: Solid State Phenomena (Volumes 178-179)
• Pages: 110-115
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.178-179.110
• Online since: August 2011
• Authors: Teimuraz Mchedlidze, Tzanimir Arguirov, Martin Kittler
• Keywords: Crystalline Si MQW, Fast Solid-Phase Crystallisation by Light, Thin Si Films on Quartz

References

[1] O. Bonnaud and T. Mohammed-Brahim: Appl. Phys., Vol. A 96 (2009), p.259.

[2] T. Zheng and Z. Li: Superlattices and Microstructures, Vol. 37 (2005), p.227.

[3] T. Mchedlidze, T. Arguirov, S. Kouteva-Arguirova, G. Jia, M. Kittler, R. Rölver, B. Berghoff, M. Först, D.L. Bätzner, B. Spangenberg: Thin Solid Films, Vol. 516 (2008), p.6800.

DOI: 10.1016/j.tsf.2007.12.083

[4] T. Mchedlidze, T. Arguirov, S. Kouteva-Arguirova, M. Kittler, R. Rölver, B. Berghoff, D. L. Bätzner, and B. Spangenberg: Phys. Rev. B., Vol. 77 (2008), p.16104(R).

DOI: 10.1016/j.mseb.2009.01.035

[5] T. Mchedlidze, T. Arguirov, S. Kouteva-Arguirova, and M. Kittler: J. Appl. Phys., Vol. 107 (2010), 124302.

DOI: 10.1063/1.3446831

[6] B. M. Lee, T. Motooka, and S. Munetoh: J. Phys.: Condens, Matter, Vol. 20 (2008), 055205.

[7] L. Khriachtchev, T. Nikitin, M. Räsänen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov: J. Appl. Phys., Vol. 108 (2010), 124301.

DOI: 10.1063/1.3520673

[8] M. Ratzke, T. Mchedlidze, T. Arguirov, N. Acharya, M. Kittler, and J. Reif: Phys. Stat. Sol. (c), Vol. 8 (2011), p.1351.

[9] R. Rölver, M. Först, O. Winkler, B. Spangenberg, H. Kurz: J. of Vac. Sci. and Technology A, Vol. 24 (2006), p.141.

[10] T. Mchedlidze, M. Beigmohamadi, B. Berghoff, R. Sohal, S. Suckow, T. Arguirov, N. Wilck, J. Mayer, B. Spangenberg, and M. Kittler: Phys. Stat. Sol. (a), Vol. 208 (2011), p.588.

DOI: 10.1002/pssa.201000156

[11] V. Domnich and Y. Gogotsi: Rev. Adv. Mat. Sci., Vol. 3 (2002), p.1.

[12] A. A. D. T. Adikaari, and S. R. P. Silva: J. Appl. Phys., Vol. 97 (2005), 114305.

[13] Ch. Ossadnik, S. Vepřek, I. Gregora: Thin Solid Films, Vol. 337 (1999), p.148.

DOI: 10.1016/s0040-6090(98)01175-4

[14] T. Arguirov, T. Mchedlidze, M. Kittler, R. Rölver, B. Berghoff, M. Först, and B. Spangenberg: Appl. Phys. Lett., Vol. 89 (2006), 053111.

DOI: 10.1063/1.2260825