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Formation of Copper-Related Deep-Level Centers in Irradiated P-Type Silicon
Abstract:
Results of a DLTS study on the deep-level centers in the copper-contaminated electron-irradiated FZ-Si are presented. Copper was diffused from the Cu-contaminated surface into previously irradiated samples at 350 K. The most abundant Cu-related complexes formed due to this procedure are the same as in the case of previously studied Cu-diffused Cz-Si.
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154-157
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August 2011
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© 2011 Trans Tech Publications Ltd. All Rights Reserved
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