Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

27-32

DOI:

10.4028/www.scientific.net/SSP.19-20.27

Citation:

M.D. de Coteau et al., "Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites", Solid State Phenomena, Vols. 19-20, pp. 27-32, 1991

Online since:

January 1991

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Price:

$35.00

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