Intrinsic/Internal Gettering in Czochralski Silicon Wafers
p.1
p.1
Defects and impurities in Multi Layer Structures on Si: The Role of Mechanical Stresses in Gettering of Defects and Impurities by Intrinsic and Extrinsic Grain Boundaries
p.13
p.13
Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites
p.27
p.27
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability
p.33
p.33
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate
p.39
p.39
On the Role of Stacking Faults in Copper Precipitation in Silicon
p.45
p.45
TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles
p.51
p.51
An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance
p.57
p.57
Intrinsic Gettering in Nitrogen-Doped Cz-Si
p.65
p.65
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate
Abstract:
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Periodical:
Solid State Phenomena (Volumes 19-20)
Pages:
39-44
Citation:
Online since:
January 1991
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Сopyright:
© 1991 Trans Tech Publications Ltd. All Rights Reserved
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