Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

39-44

DOI:

10.4028/www.scientific.net/SSP.19-20.39

Citation:

Z. Laczik et al., "Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate", Solid State Phenomena, Vols. 19-20, pp. 39-44, 1991

Online since:

January 1991

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$35.00

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