TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

51-56

DOI:

10.4028/www.scientific.net/SSP.19-20.51

Citation:

A.R. Bhatti et al., "TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles", Solid State Phenomena, Vols. 19-20, pp. 51-56, 1991

Online since:

January 1991

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$35.00

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