Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

33-38

DOI:

10.4028/www.scientific.net/SSP.19-20.33

Citation:

R. J. Falster et al., "Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability", Solid State Phenomena, Vols. 19-20, pp. 33-38, 1991

Online since:

January 1991

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$35.00

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