An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

57-64

DOI:

10.4028/www.scientific.net/SSP.19-20.57

Citation:

L. Tesar et al., "An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance", Solid State Phenomena, Vols. 19-20, pp. 57-64, 1991

Online since:

January 1991

Export:

Price:

$35.00

In order to see related information, you need to Login.