Characterization of Surface Metal Contaminations on Fused Quartz
Micro-contamination exerts ever-increasing adverse impact on semiconductor manufacturing as device integration scale keeps increasing and device geometry continues decreasing. In particular, contaminations from particles, trace metals, and/or organic compounds can reduce device yield, quality, and reliability [. Metallic impurities from materials used for process equipment are one of the major contamination sources.
Paul Mertens, Marc Meuris and Marc Heyns
S. Liu, B. Liu, "Characterization of Surface Metal Contaminations on Fused Quartz", Solid State Phenomena, Vol. 195, pp. 277-279, 2013