Simulation of Electron Injection and Charging Processes in Ferroelectrics Modified with the SEM-Techniques

Abstract:

The paper presents results of a computer simulation of dynamic processes caused by electron injection and charging-up effects in ferroelectrics irradiated by electron bunches with average energy. The implementation of electron transport simulation in ferroelectrics was performed by Monte-Carlo method to express the initial volume charge distribution. The calculation of charging characteristics was based on solution of Poisson equation using finite element method. The calculated distribution of potential as well as field intensity electron beam-induced for model sample were analyzed at given experimental parameters.

• Periodical: Solid State Phenomena (Volume 213)
• Pages: 119-124
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.213.119
• Online since: March 2014
• Authors: Anna Maslovskaya*, Anton V. Sivunov
• Keywords: Charging Effect, Electron Beam Trajectories, Electron Injection, Ferroelectric, Scanning Electron Microscope (SEM), Simulation

References

[1] J. He, S.H. Tang, Y.Q. Qin, P. Dong, H.Z. Zhang, C.H. Kang, W.X. Sun, Z.X. Shen, Two-dimensional structures of ferroelectric domain inversion in LiNbO3 by direct electron beam lithography, J. Appl. Phys. 93 (2003) 9943–9947.

DOI: 10.1063/1.1575918

[2] L.S. Kokhanchic, The use of surface charging in the SEM for lithium niobate domain structure investigation, Micron. 40(2009) 41-45.

DOI: 10.1016/j.micron.2008.02.009

[3] P. Molina, M.O. Ramírez, J. García-Sole, L.E. Bausá, Effect of electron beam writing parameters for ferroelectric domain structuring LiNbO3: Nd3+, Optical Materials. 31 (2009) 1777–1780.

DOI: 10.1016/j.optmat.2008.12.033

[4] A.A. Sogr, A.G. Maslovskaya, I.B. Kopylova, Advanced modes of imaging of ferroelectric domains in the SEM, Ferroelectrics. 341(2006) 29-37.

DOI: 10.1080/00150190600889338

[5] G.M. Sessler, M.T. Figueiredo, G.F. Leal Ferreira, Models of charge transport in electron-beam irradiated insulators, Dielectrics and Electrical Insulation, IEEE Transactions on, 11(2004) 192-202.

DOI: 10.1109/tdei.2004.1285887

[6] H. Suga, H. Tadokoro, M. Kotera, A simulation of electron beam induced charging-up of insulators, Electron microscopy. 1(1998) 177-178.

[7] A. Maslovskaya, T. Barabash, Dynamic simulation of polarization reversal processes in ferroelectric crystals under electron beam irradiation, Ferroelectrics. 442 (2013) 18-26.

DOI: 10.1080/00150193.2013.773855

[8] D.C. Joy, Monte-Carlo modeling for electron microscopy and microanalysis, New York: Oxford University Press, (1995).

[9] E. Napchan, Monte Carlo simulation of electron trajectory, European Microscopy and Analysis, 2(1992) 21-23.

[10] Z. Czyzewski, D.O. MacCallum, A. Roming, D.C. Joy, Calculations of Mott scattering cross section, J. Appl. Phys. 68 (1990) 3066-3072.

DOI: 10.1063/1.346400

[11] A.G. Maslovskaya, Physical and mathematical modeling of the electron-beam-induced charging of ferroelectrics during the process of domain-structure switching, Journal of Surface Investigation. 7(2013) 680-684.

DOI: 10.1134/s1027451013040125

[12] W.K. Young, H. Bang, Finite element method using MATLAB (Mechanical Engineering), CRC-Press, (1996).