Extended-Nanofluidic Devices and the Unique Liquid Properties - Invited Paper

Kazuma Mawatari; Takehiko Kitamori

doi:10.4028/www.scientific.net/SSP.255.157

Paper Titles

Pattern Collapse of High-Aspect-Ratio Silicon Nanostructures - A Parametric Study
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Influence of CO₂ Gas Atmosphere on the Liquid Filling of Superhydrophobic Nanostructures
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Some Critical Issues in Pattern Collapse Prevention and Repair
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Watermark-Free and Efficient Spray Clean on Hydrophobic Surface with Single-Wafer Technology
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Extended-Nanofluidic Devices and the Unique Liquid Properties - Invited Paper
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Measurement of the Frictional Force between PVA Roller Brushes and Semiconductor Wafers with Various Films Immersed in Chemicals
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Removal of Bull’s Eye Signature by Optimizing Wet Cleans Recipe
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Toward CO₂ Beam Cleaning of 20-nm Particles in Atmospheric Pressure
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Liquid Cell Platform to Directly Visualize Bottom-Up Assembly and Top-Down Etch Processes inside TEM
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HomeSolid State PhenomenaSolid State Phenomena Vol. 255Extended-Nanofluidic Devices and the Unique Liquid...

Extended-Nanofluidic Devices and the Unique Liquid Properties - Invited Paper

Abstract:

Microfluidic devices are downscaling to 10-100 nm space, which we call extended-nano space. Because the extended-nano space is a space to bridge isolated molecules and normal bulk fluid, new solution chemistry can be expected. However, it was difficult to investigate due to the ultra-small space. Our group developed fundamental technologies for the extended-nano fluidics such as nanofabrication and bonding for glass substrates, aL-fL pressure driven fluidic control, partial surface modification, and single molecule detection. Based on these technologies, many unique liquid properties were found such as viscosity increase, enhanced proton mobility, lower dielectric constant. In addition, the liquid property changes depended on channel size, channel shape, and kinds of liquid. New analytical and energy devices are created utilizing the unique properties in the extended-nano space. In this talk, fundamental technologies and unique liquid properties found in this space are mainly presented, which would have impact not only on chemistry and biology but also on semiconductor industry.

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Periodical:

Solid State Phenomena (Volume 255)

Pages:

157-160

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.255.157

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Online since:

September 2016

Authors:

Kazuma Mawatari*, Takehiko Kitamori

Keywords:

Device, Extended-Nanospace, Liquid Property, Nanofluidics

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