Influence of CO2 Gas Atmosphere on the Liquid Filling of Superhydrophobic Nanostructures

Guy Vereecke; Haroen Debruyn; Xiu Mei Xu; Frank Holsteyns; Stefan de Gendt

doi:10.4028/www.scientific.net/SSP.255.141

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Influence of CO₂ Gas Atmosphere on the Liquid Filling of Superhydrophobic Nanostructures
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Influence of CO₂ Gas Atmosphere on the Liquid Filling of Superhydrophobic Nanostructures

Abstract:

The introduction of 3-D nanostructures in semiconductor manufacturing may create wetting issues in aqueous processing. In this work we evaluated the use of a CO₂ gas atmosphere to promote the wetting of superhydrophobic nanopillars, relying on the high solubility of CO₂ in aqueous solutions. The patterned surface was first flushed with CO₂ gas, before dispensing the aqueous solution that was saturated with N₂ and switching the gas flow from CO₂ to N₂. The liquid penetration was characterized by monitoring the disappearance of CO₂ gas using ATR-FTIR. Results showed only a modest improvement in wetting, presumably due to a fast N₂-CO₂ gas exchange at the wetting front.

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Solid State Phenomena (Volume 255)

Pages:

141-146

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.255.141

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Online since:

September 2016

Authors:

Guy Vereecke*, Haroen Debruyn, Xiu Mei Xu, Frank Holsteyns, Stefan de Gendt

Keywords:

ATR-FTIR, CO₂ Gas, Nanostructures, Superhydrophobic, Wetting

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