Electrical Characterization of As-Processed Semiconductor Surfaces - Invited Paper

Jerzy Ruzyllo; Patrick J. Drummond

doi:10.4028/www.scientific.net/SSP.255.299

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HomeSolid State PhenomenaSolid State Phenomena Vol. 255Electrical Characterization of As-Processed...

Electrical Characterization of As-Processed Semiconductor Surfaces - Invited Paper

Abstract:

The paper is concerned with electrical characterization of as-processed semiconductor surfaces and near-surface regions for the purpose of process development and monitoring. The methods of electrical characterization based on Surface Photovoltage (SPV) and Photoconductance Decay (PCD) effects are discussed as being particularly conducive with the needs of as-processed semiconductor surface characterization and experimental results demonstrating merits of the proposed methodology are presented.

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Periodical:

Solid State Phenomena (Volume 255)

Pages:

299-303

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.255.299

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Online since:

September 2016

Authors:

Jerzy Ruzyllo*, Patrick J. Drummond

Keywords:

Chemical Composition, Photo-Conductance Decay (PCD), Physical Damage, Surface Charge, Surface Photovoltage (SPV), Surface Recombination Lifetime

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* - Corresponding Author

References

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