Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
p.197
p.197
Interaction between Free-Surface Oscillation and Bubble Translation in a Megasonic Cleaning Bath
p.202
p.202
Study on Uniform Deposition on 300 mm Silicon Wafer with Sub-100 nm Sized Particles for Cleaning Application
p.209
p.209
Ultrafine Particle Removal in the Wafer Cleaning Process Using an Aqueous Solution with a High Concentration of Dissolved O3 and HF
p.214
p.214
Particle Removal in Ultrasonic Water Flow Cleaning Role of Cavitation Bubbles as Cleaning Agents
p.218
p.218
Scalable Particle Removal for sub-5 nm Nodes
p.222
p.222
The Effect of Thermal Aging on Nano-Particle Removal
p.228
p.228
Contact Vs. Non-Contact Cleaning: Correlating Interfacial Reaction Mechanisms to Processing Methodologies for Enhanced FEOL/BEOL Post-CMP Cleaning
p.237
p.237
Effect of Viscosity on Ceria Abrasive Removal in the Buffing CMP Process
p.247
p.247
Particle Removal in Ultrasonic Water Flow Cleaning Role of Cavitation Bubbles as Cleaning Agents
Abstract:
Visualization experiments are performed to examine the role of acoustic cavitation bubbles that appear in 0.43-MHz ultrasonic water flow spreading over glass surfaces in the context of physical cleaning. The cleaning performance is evaluated using glass samples on which small silica particles are spin-coated. The visualization suggests that acoustic cavitation bubbles play a major role in particle removal as in the case of conventional cleaning with ultrasonic cleaning baths.
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Periodical:
Solid State Phenomena (Volume 314)
Pages:
218-221
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Online since:
February 2021
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