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HomeSolid State PhenomenaSolid State Phenomena Vol. 346Monitoring of Trace Molecular Impurities in...

Monitoring of Trace Molecular Impurities in Clean-Room Air

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Abstract:

A new measurement system has been introduced to perform real-time measurements of molecular air contaminants at different location in a clean room down to a concentration of approximately 0.1 ppb. The system consists of an air sampling unit coupled to a proton transfer mass spectrometer and a Cavity Ring-Down Spectrometer. The measurements show that the time average concentrations of more than 10 different volatile impurity molecules exceed 1 ppb.

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Periodical:

Solid State Phenomena (Volume 346)

Pages:

183-188

DOI:

https://doi.org/10.4028/p-BH3umg

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Online since:

August 2023

Authors:

Karine Kenis*, Paul W. Mertens, Efrain Altamirano-Sanchez, Joost Van Ongeval, Marie De Vita

Keywords:

Airborne Molecular Contamination (AMC), Cavity Ring-Down Spectrometry (CRDS), NH₃, PTRMS, Volatile Organic Compound (VOC)

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© 2023 Trans Tech Publications Ltd. All Rights Reserved

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