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HomeSolid State PhenomenaSolid State Phenomena Vols. 37-38Defect Structure of Multicrystalline Chemical...

Defect Structure of Multicrystalline Chemical Vapor Deposited Silicon Films

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Abstract:

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Polycrystalline Semiconductors III

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Periodical:

Solid State Phenomena (Volumes 37-38)

Pages:

381-386

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.37-38.381

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Online since:

March 1994

Authors:

A. Voigt, B. Rillich, Horst P. Strunk

Keywords:

Chemical Vapor Deposition (CVD), Defect Structure, Solar Cell, Surface Topology, Texture

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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