Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 47-48)

Edited by:

H. Richter, M. Kittler and C. Claeys

Pages:

65-96

DOI:

10.4028/www.scientific.net/SSP.47-48.65

Citation:

H. R. Huff and R.K. Goodall, "Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era", Solid State Phenomena, Vols. 47-48, pp. 65-96, 1996

Online since:

July 1995

Export:

Price:

$35.00

In order to see related information, you need to Login.