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HomeSolid State PhenomenaSolid State Phenomena Vols. 47-48Expected Limits for Manufacturing Very Large...

Expected Limits for Manufacturing Very Large Silicon Wafers

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Gettering and Defect Engineering in Semiconductor Technology VI

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

97-106

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.97

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Online since:

July 1995

Authors:

W. v. Ammon

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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