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HomeSolid State PhenomenaSolid State Phenomena Vols. 47-48Room Temperature UHV Silicon Direct Bonding

Room Temperature UHV Silicon Direct Bonding

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Gettering and Defect Engineering in Semiconductor Technology VI

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

143-152

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.143

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Online since:

July 1995

Authors:

F. Shi, G. Elssner, Manfred Reiche, U.M. Gösele

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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