Paper Titles

Multicrystalline Silicon for Solar Cells
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External Gettering for Multicrystalline Silicon Wafers
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Gettering of Transition Metals in Multicrystalline Silicon for Photovoltaic Applications
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Gettering of Au in Heat Treated Si/SiGe/Si Structures
p.171

Gettering of Low Concentration Copper, Nickel and Iron Contamination in Czochralski Silicon Wafers
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Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing
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Interactions between Dopants and End-of-Range Defects in Silicon
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Behaviour of the Size Distribution Function of End-of-Range Dislocation Loops during Silicon Oxidation
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HomeSolid State PhenomenaSolid State Phenomena Vols. 47-48Gettering of Au in Heat Treated Si/SiGe/Si...

Gettering of Au in Heat Treated Si/SiGe/Si Structures

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Gettering and Defect Engineering in Semiconductor Technology VI

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

171-176

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.171

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Online since:

July 1995

Authors:

K. Schmalz, D. Krüger, R. Kurps, T. Morgenstern, H.P. Zeindl

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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