Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing

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Periodical:

Solid State Phenomena (Volumes 47-48)

Edited by:

H. Richter, M. Kittler and C. Claeys

Pages:

183-194

DOI:

10.4028/www.scientific.net/SSP.47-48.183

Citation:

S. V. Koveshnikov et al., "Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing", Solid State Phenomena, Vols. 47-48, pp. 183-194, 1996

Online since:

July 1995

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Price:

$35.00

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