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HomeSolid State PhenomenaSolid State Phenomena Vols. 47-48Behaviour of the Size Distribution Function of...

Behaviour of the Size Distribution Function of End-of-Range Dislocation Loops during Silicon Oxidation

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Gettering and Defect Engineering in Semiconductor Technology VI

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

205-210

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.205

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Online since:

July 1995

Authors:

Michael Seibt, E. Spiecker

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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