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Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing
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Interactions between Dopants and End-of-Range Defects in Silicon
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HomeSolid State PhenomenaSolid State Phenomena Vols. 47-48Gettering of Low Concentration Copper, Nickel and...

Gettering of Low Concentration Copper, Nickel and Iron Contamination in Czochralski Silicon Wafers

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Gettering and Defect Engineering in Semiconductor Technology VI

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Periodical:

Solid State Phenomena (Volumes 47-48)

Pages:

177-182

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.47-48.177

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Online since:

July 1995

Authors:

Z. Laczik, L. Bouwhuis, G.R. Booker, Robert J. Falster

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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