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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7Electron Pulse Irradiation of Semiconductor...

Electron Pulse Irradiation of Semiconductor Devices

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

361-366

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.361

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Online since:

January 1989

Authors:

M. Lenk, R. Mehnert, A. Müller, L. Prager, E. Koch

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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