Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 6-7)

Edited by:

M. Kittler

Pages:

395-402

DOI:

10.4028/www.scientific.net/SSP.6-7.395

Citation:

Z. Laczik et al., "Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering ", Solid State Phenomena, Vols. 6-7, pp. 395-402, 1989

Online since:

January 1989

Export:

Price:

$35.00

In order to see related information, you need to Login.