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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7Scanning Infra-Red Microscope Investigation of...

Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

395-402

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.395

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Online since:

January 1989

Authors:

Z. Laczik, G.R. Booker, Robert J. Falster

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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