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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7The Capacitance Microscope: A Non-Contacting...

The Capacitance Microscope: A Non-Contacting Stylus Technique for the Investigation of Semicionductor Surfaces

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

411-422

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.411

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Online since:

January 1989

Authors:

H.P. Kleinknecht, Horst Meier

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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