The Peculiarities of Deep Level Defect Passivation in SI by Atomic Hydrogen

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Periodical:

Solid State Phenomena (Volumes 6-7)

Edited by:

M. Kittler

Pages:

341-342

DOI:

10.4028/www.scientific.net/SSP.6-7.341

Citation:

S. V. Koveshnikov et al., "The Peculiarities of Deep Level Defect Passivation in SI by Atomic Hydrogen ", Solid State Phenomena, Vols. 6-7, pp. 341-342, 1989

Online since:

January 1989

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$35.00

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