Defect Kinetics and Impurity Diffusion During Hot Implants Into Silicon

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Periodical:

Solid State Phenomena (Volumes 6-7)

Edited by:

M. Kittler

Pages:

335-340

DOI:

10.4028/www.scientific.net/SSP.6-7.335

Citation:

K. Holldack et al., "Defect Kinetics and Impurity Diffusion During Hot Implants Into Silicon", Solid State Phenomena, Vols. 6-7, pp. 335-340, 1989

Online since:

January 1989

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Price:

$35.00

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