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HomeSolid State PhenomenaSolid State Phenomena Vols. 63-64Non-Destructive Investigations of Co and CoSi2-x...

Non-Destructive Investigations of Co and CoSi_2-x Films on Si Substrate

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Beam Injection Assessment of Defects in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 63-64)

Pages:

347-352

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.63-64.347

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Online since:

December 1998

Authors:

N.L. Dmitruk, O.V. Fursenko, Arthur Medvid, D. Knight, A. Grigonis

Keywords:

Cobalt, Ellipsometry, Silicide

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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