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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Characterisation of Excimer Laser Crystallised...

Characterisation of Excimer Laser Crystallised Polysilicon by X-Ray Diffraction and by Channeling Contrast in a Scanning Electron Microscope

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Abstract:

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

181-186

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.181

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Online since:

April 1999

Authors:

S. Loreti, M. Vittori, L. Mariucci, G. Fortunato

Keywords:

Electron Channeling Contrast (ECC), Excimer Laser Crystallization, Scanning Electron Microscope (SEM), X-Ray Diffraction (XRD)

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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