Paper Titles

Thickness Control of the Amorphous Buffer Layer of Hydrogenated Nanocrystalline Silicon: Effect of the Dopant Concentration
p.137

Structure Dependence of the Electrical Conductivity of Hydrogenated Nanocrystalline Silicon Films
p.143

Highly Doped Microcrystalline SiGe Films: Structure and Transport Properties
p.149

Photoluminescence Measurements of Microcrystalline Silicon
p.155

Silicon Produced by Thermal Chemical Vapour Deposition on Ceramic Substrates for Photovoltaic Applications
p.161

Grain Matrix Made with Excimer-Laser Crystallization of Thin Silicon Films
p.169

Grain Boundary Location Control by Patterned Metal Film in Excimer Laser Crystallized Polysilicon
p.175

Characterisation of Excimer Laser Crystallised Polysilicon by X-Ray Diffraction and by Channeling Contrast in a Scanning Electron Microscope
p.181

Multicrystalline Silicon Thin Films: Laser Crystallization Conditions and Properties
p.187

HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Silicon Produced by Thermal Chemical Vapour...

Silicon Produced by Thermal Chemical Vapour Deposition on Ceramic Substrates for Photovoltaic Applications

Article Preview

Abstract:

You might also be interested in these eBooks

Polycrystalline Semiconductors V

Info:

Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

161-168

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.161

Citation:

Cite this paper

Online since:

April 1999

Authors:

A.J.M.M. Van Zutphen, A. Von Keitz, M. Zeman, J.W. Metselaar

Keywords:

Deposition, Polycrystalline, Silicon Films, Substrate, Thermal CVD

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1999 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: