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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Highly Doped Microcrystalline SiGe Films:...

Highly Doped Microcrystalline SiGe Films: Structure and Transport Properties

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Polycrystalline Semiconductors V

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Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

149-154

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.149

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Online since:

April 1999

Authors:

F. Edelman, T. Raz, Y. Komem, M. Stölzer, P. Zaumseil

Keywords:

Crystallization, Electron Transport, Silicon-Germanium Films, X-Ray Diffraction (XRD)

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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